|
Dyuthi @ CUSAT >
e-SCHOLARSHIP >
Physics >
Faculty >
Dr. M K Jayaraj >
Please use this identifier to cite or link to this item:
http://purl.org/purl/765
|
| Title: | Characterization of radio frequency plasma using Langmuir probe and optical emission spectroscopy |
| Authors: | Jayaraj, M K |
| Keywords: | radio frequency plasma
Langmuir probe
optical emission spectroscopy
Argon
Indium Tin Oxide |
| Issue Date: | 4-Jan-2006 |
| Publisher: | American Institute of Physics |
| Abstract: | The radio frequency plasma generated during the sputtering of Indium Tin Oxide target using Argon
was analyzed by Langmuir probe and optical-emission spectroscopy. The basic plasma parameters
such as electron temperature and ion density were evaluated. These studies were carried out by
varying the RF power from 20 to 50 W. A linear increase in ion density and an exponential decrease
in electron temperature with rf power were observed. The measured plasma parameters were then
correlated with the properties of ITO thin films deposited under similar plasma conditions. |
| URI: | http://dyuthi.cusat.ac.in/purl/765 |
| Appears in Collections: | Dr. M K Jayaraj
|
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
|
