Nampoori, V P N; Radhakrishnan, P; Girijavallabhan, C P; Shelly John, M(Measurement Science and Technology, UK, November 12, 1998)
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Abstract:
A novel sensing technique for the in situ monitoring of the rate of pulsed laser
deposition (PLD) of metal thin films has been developed. This optical fibre based sensor
works on the principle of the evanescent wave penetration of waveguide modes into the
uncladded portion of a multimode fibre. The utility of this optical fibre sensor is
demonstrated in the case of PLD of silver thin films obtained by a Q-switched Nd:YAG laser
which is used to irradiate a silver target at the required conditions for the preparation of thin
films. This paper describes the performance and characteristics of the sensor and shows how
the device can be used as an effective tool for the monitoring of the deposition rate of silver
thin films. The fibre optic sensor is very simple, inexpensive and highly sensitive compared
with existing techniques for thin film deposition rate measurements.