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Please use this identifier to cite or link to this item: http://dyuthi.cusat.ac.in/purl/2392

Title: An optical fibre based evanescent wave sensor to monitor the deposition rate of thin films
Authors: Deepa, Jose
Shelly John, M
Radhakrishnan, P
Nampoori, V P N
Vallabhan, C P G
Keywords: Optical spectroscopy
Plasma processing and deposition
Issue Date: 18-Jul-1998
Publisher: Elsevier
Abstract: A novel fibre optic sensor for the in situ measurement of the rate of deposition of thin films has been developed. Evanescent wave in the uncladded portion of a multimode fibre is utilised for this sensor development. In the present paper we demonstrate how this sensor is useful for the monitoring of the deposition rate of polypyrrole thin films, deposited by an AC plasma polymerisation method. This technique is simple, accurate and highly sensitive compared with existing techniques.
URI: http://dyuthi.cusat.ac.in/purl/2392
ISSN: 0040-6090
Appears in Collections:Dr.C P Girijavallabhan

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