An optical fibre based evanescent wave sensor to monitor the deposition rate of thin films

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An optical fibre based evanescent wave sensor to monitor the deposition rate of thin films

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dc.contributor.author Deepa, Jose
dc.contributor.author Shelly John, M
dc.contributor.author Radhakrishnan, P
dc.contributor.author Nampoori, V P N
dc.contributor.author Vallabhan, C P G
dc.date.accessioned 2011-10-27T08:23:51Z
dc.date.available 2011-10-27T08:23:51Z
dc.date.issued 1998-07-18
dc.identifier.issn 0040-6090
dc.identifier.other Thin Solid Films Volume 325, Issues 1-2, 18 July 1998, Pages 264-267
dc.identifier.uri http://dyuthi.cusat.ac.in/purl/2392
dc.description.abstract A novel fibre optic sensor for the in situ measurement of the rate of deposition of thin films has been developed. Evanescent wave in the uncladded portion of a multimode fibre is utilised for this sensor development. In the present paper we demonstrate how this sensor is useful for the monitoring of the deposition rate of polypyrrole thin films, deposited by an AC plasma polymerisation method. This technique is simple, accurate and highly sensitive compared with existing techniques. en_US
dc.description.sponsorship Cochin University of Science and Technology en_US
dc.language.iso en en_US
dc.publisher Elsevier en_US
dc.subject Optical spectroscopy en_US
dc.subject Plasma processing and deposition en_US
dc.subject Polymers en_US
dc.subject Sensors en_US
dc.title An optical fibre based evanescent wave sensor to monitor the deposition rate of thin films en_US
dc.type Working Paper en_US
dc.contributor.faculty Technology en_US
dc.identifier.url http://www.sciencedirect.com/science/article/pii/S0040609098004982 en_US


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