Jayaraj, M K(American Institute of Physics, January 4, 2006)
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Abstract:
The radio frequency plasma generated during the sputtering of Indium Tin Oxide target using Argon
was analyzed by Langmuir probe and optical-emission spectroscopy. The basic plasma parameters
such as electron temperature and ion density were evaluated. These studies were carried out by
varying the RF power from 20 to 50 W. A linear increase in ion density and an exponential decrease
in electron temperature with rf power were observed. The measured plasma parameters were then
correlated with the properties of ITO thin films deposited under similar plasma conditions.
Girijavallabhan, C P; Radhakrishnan, P; V P N Nampoori; Nandakumaran, V M; Dann, V J; Mathew, M V(Plasma Science and Technology, August , 2007)
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Abstract:
Optical emission from TiO2 plasma, generated by a nanosecond laser is spectroscopically
analysed. The main chemical species are identified and the spatio-temporal distribution of
the plasma parameters such as electron temperature and density are characterized based on the
study of spectral distribution of the line intensities and their broadening characteristics. The parameters
of laser induced plasma vary quickly owing to its expansion at low background pressure
and the possible deviations from local thermodynamic equilibrium conditions are tested to show
its validity.
Nandakumaran, V M; V P N Nampoori; Radhakrishnan, P; Girijavallabhan, C P; Dann, V J; Mathew, M V(Plasma Science and Technology, August , 2007)
[+]
[-]
Abstract:
Optical emission from TiO2 plasma, generated by a nanosecond laser is spectroscopically
analysed. The main chemical species are identified and the spatio-temporal distribution of
the plasma parameters such as electron temperature and density are characterized based on the
study of spectral distribution of the line intensities and their broadening characteristics. The parameters
of laser induced plasma vary quickly owing to its expansion at low background pressure
and the possible deviations from local thermodynamic equilibrium conditions are tested to show
its validity.
Radhakrishnan, P; Nampoori, V P N; Girijavallabhan, C P; Nandakumaran, V M; Dann, V J; Mathew, M V(Plasma Science and Technology, August , 2007)
[+]
[-]
Abstract:
Optical emission from TiO2 plasma, generated by a nanosecond laser is spectroscopically
analysed. The main chemical species are identified and the spatio-temporal distribution of
the plasma parameters such as electron temperature and density are characterized based on the
study of spectral distribution of the line intensities and their broadening characteristics. The parameters
of laser induced plasma vary quickly owing to its expansion at low background pressure
and the possible deviations from local thermodynamic equilibrium conditions are tested to show
its validity
V P N Nampoori; Radhakrishnan, P; Girijavallabhan, C K; Nandakumaran, V M; Dann, V J; Mathew, M V(Plasma Science and Technology, August , 2007)
[+]
[-]
Abstract:
Optical emission from TiO2 plasma, generated by a nanosecond laser is spectroscopically
analysed. The main chemical species are identified and the spatio-temporal distribution of
the plasma parameters such as electron temperature and density are characterized based on the
study of spectral distribution of the line intensities and their broadening characteristics. The parameters
of laser induced plasma vary quickly owing to its expansion at low background pressure
and the possible deviations from local thermodynamic equilibrium conditions are tested to show
its validity.